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Are you using 7I95T encoder feedback?

Can you post your hal/ini files?

Reducing the steplength and stepspace parameters
will not directly cause a following error, though reducing them
will allow higher speeds that may expose other limits.

The 7I95T is capable of generating up to 10 MHz step rates

 

I see something in this last image which I'm sure is just a future task but it was a problem in the old planner so I'll mention it.

You should NEVER blend G0 rapid moves. And definitely not blend them into a G1.

G0 always needs to be exact stop (with jerk control). If you blend a G0 move you wind up hitting fixtures, vises, gouging your work and breaking tools.

Normally you would set this so it never gives errors in normal operation
(since stopping on a following error is catastrophic )

I'm trying to reach 10000mm/min max velocity on three axis, but lowering STEPLEN and STEPSAPECE below 1000 nanoseconds, following error shows up immediately.
Based on driver specs Maximum frequency of input is 1MHZ (Differential motion).

I believe mesa 7i95T isn't limiting factor here!?

My current values:
DIRSETUP          = 200
DIRHOLD            = 200
STEPLEN            = 1000
STEPSPACE       = 1000
SCALE                = 2000